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LiTaO3

LiTaO3  SAW  Wafer

Specifications:

Diameter

f40mm ~ f102mm

Thickness

0.2~1.2mm

Orientation

X, Z, 36, 42, 128

Ref. flat orientation

X or Y

Ref. Flat width

162mm, 182mm, 222mm, 322mm

Front polish

0.016 ~0.001μm

Back lapping

0.3 ~10

Flatness

<10μm for f40 ~ 65mm
<15
μm for f65 ~ 102mm

Bow

<20μm for f40~ 65 mm,
<40
μm for f65 ~102mm

   

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